The HYT Model 20SX and Model 25SX vacuum particle sensors detect particles in noncorrosive, vacuum process equipment. These laserbased sensors can be installed in loadlock or process chambers or into exhaust pump lines. They have been proven in highproduction fabs on tools such as sputtering systems and ion implanters.
Methods are provided for identifying root causes of particle issues and for developing particlerobust process recipes in plasma deposition processes. The presence of in situ particles within the substrate processing system is detected over a period of time that spans multiple distinct processing steps in the recipe. The time dependence of in situ particle levels is determined from these results.
conic head sensor and then the particles are detected with a laser diode. The detected particle sizes are: , , , ,1 and 5 Ilm. HYT PM 250 Model The HYT PM250 sensor can operate in air or in vacuum. The particles fall through a window crossing in its center a laser beam of about 1 mm diameter.
Each PM250E supports one HYT sensor; up to 15 controllers can be daisychained together and monitored by a single computer. Conveniently mount the PM250E to any surface using the provided threaded inserts. HYT controllers support realtime particle monitoring tasks. Use the patented Machine Trigger function to synchronize particle data collection
Telaire SMUART04L | Particulate Dust Sensor. Telaire SMUART04L Particulate Dust Sensor is designed for a wide range of air quality applications where fine particle dust needs to be measured. The optical design leverages laser technology, which allows customers to achieve excellent performance with balanced reliability.
II. THE VACUUM PARTICLE COUNTER AND ITS MODELING The particle counter used in this study is the PMlOO flux monitor (HYT), II developed for use in vacuum. The system includes a sensor head, preamplifier, and controller. The sensor is a compact, selfcontained probe that is designed to fit directly into process chambers and pumping lines. The
Aug 14, 2014· I am restarting thread234262936: In Situ Particle Monitoring for in situ particle monitoring. I have many years of experience in the use of HYT in situ vacuum particle sensors and have installed the sensors in many Semiconductor Fab applications. The HYT system is very reliable but excessive heat can reduce the laser life significantly.
Feb 15, 2015· A particle detector module designed to be integrated into a vacuum chamber. A PSI HYT Model 70XE sensor, which provides sensitivity down to μm through a dark field, light scattering detection scheme. Used with permission from Pacific Scientific Instruments/Hach Ultra.
To allow for measurements of the particle creation during activation of the CapaciTorr ® D4002 an invacuum particle counter was used. The particle counter used was a HYT 70XE . This sensor is operable between 10 =8 mbar to 7bar . The detectable particle size ranges are , , , and 1µm . A drawback of
Jan 01, 1995· The basic particulate sensor is alightscattering device built by High Yield Technology (HYT) to measure particle fluxes in the vacuum processing of silicon wafers. The sensor contains an AIGaAs laser diode source (Class IIIb) that projects a 20 mW laser beam, a beamforming lens, a beam stop, reflecting mirrors, and two photocell detectors ...
HYT 939 Hermetically Sealed Digital Humidity Sensor HYT 939 has a welded, hermetically sealed TO 39 housing with glass grommet and sinter filter designed for compressed air systems up to 16 bar. Due to the humidity calibration process and special polynomial correction method, a high accuracy of ±% rH is achieved in the the low humidity ...
The Particle Measuring Systems VacuLaz Vacuum Particle Counter measures contaminants in exhaust lines of process chambers and loadlocks. The VacuLaz® system consists of a viewing module, a sensor and an electronics interface module. Depending on the application, aluminum is used in the construction of the viewing module with sapphire coated ...
applied materials/ hach ultra hyt 20sxg laser vacuum particle sensor amat wxz applied materials 020009072 shield 200mm rev 001 amat horiba stec secz313m mass flow controller mfc amat applied materials 004032449 lid pumping plate simpl lid gig rev 002 amat applied materials 001013264 assy, outer magnets tube, hp robot amat
There are three basic elements in all particle counting systems: 1) The sensor The sensor is the device that detects particles using a light scattering method of detection. 2) The sample delivery system The sample is delivered to the sensor by the use of a vacuum pump. 3) The counting electronics The particle counts are processed and
accurate and reliable particle counting. Reduces downtime through instant troubleshooting with advanced user notification lights for flow, sensor, communication, alarm and alert with builtin or external lights. Easy to integrate with any FMS system through multiple communication options including Serial Modbus, Ethernet, Analog and Wireless.
The Model 20BE vacuum particle sensor from the HYT product line is a highperformance sensor for monitoring particles in inert and high vacuum environments. By continuously monitoring the vacuum system, the laserbased sensor can reveal particle excursions earlier than sampling techniques.
May 05, 1999· In situ particle monitors (ISPMs) have been developed and evaluated by installing them onto a variety of vacuum tools. It has been shown that the ISPM’s enable: (1) detection of sporadic particles in vacuum chambers, (2) specification of particle sources, (3) detection of tool maintenance cycles, and (4) optimization of chamber venting conditions. In the process of evaluating the ISPM’s ...